With more than 200 man-years of experience in semiconductor automation systems, we bring the most intelligent components, sub-systems, equipment and total solution to meet your unique clean-room robotics and automation requirements.
We are your extended engineering team!
By Quartet Mechanics
Quartet Mechanics' core technology lies in the area of micron-level (sub 5 µm) precision material handling, machine vision systems, advanced clean-room robotics and custom automation. All our components are designed as modules, so a single tool can bridge between various substrate materials, sizes, shapes, process steps with no or limited change-over.
The multi-functional wafer handler with sensor-controlled SoftTouch mechanism sets Quartet Mechanics apart from competitors, one hanlder for 50~1800 micron in thickness.
We launched the 1st 6"/8" vortex (Bernoulli) handler in 2007, 1st 12" in 2012, coupled with the SoftTouch mechanism - Our unique soluiton is the answer to your special needs.
Common platform design for all wafer sizes; design to assure the system's functionality, versatility, cost of ownership, and ease of upgrading
Configurable software platform for multi size wafer and carrier type, easy and intuitive animated GUI, host communication via SECS/GEM