OM-Loader: to load wafer onto the microscope & visual inspection, non-contact

OM loader for visual inspection

VISUAL INSPECTION & MICROSCOPE LOADER

Quartet Mechanics’ wafer auto loader employes the most advanced handling technology, featured by a versatile platform that accommodates all sorts of carriers (FOUP/FOSB/SMIF/cassette) and wafers (one tool to handle wafer from 50 to 1600μm thickness, 6”/8” or 8”/12 multi size). It also features a 270-degree self-tilting function for a complete macro inspection of the wafer's top and back surface.

System Feature

Adjustable 6”/ 8” and 8/12” wafers
Handles from 50 to 1600μm wafer thickness
Safe non contact top/bottom pick, flipping and aligning
For FOUP/FOSB/SMIF/cassette
Cassette mapping and cross-slot detection
Wafer & carrier’s ID capturing and verifying
Operates without vacuum (pneumatic air needed for thin wafer)

Sample Application

12" Si Wafer Contact Handling

12” Si wafer, frame with FOUP, macro (front side) and Olympus microscope inspection

8" IGBT Wafer Non-Contact Handling

8”, thin warped/Taiko, frame with cassette, macro (front/back side) and Nikon microscope inspection

8" SiC Wafer Non-Contact Handling

8”, thin SiC, frame with SMIF, macro (front/back side) and Nikon microscope inspection

6"/8" Si Wafer Contact Handling

6" or 8" Si wafer, economical table-top, macro (front/back side & edge) and Leica microscope inspection

Demonstration Video

Download Product Flyer

Download Flyer

Quartet Mechanics Introduction (PDF)
English

Bondless Wafer Stacking (PDF)
English
中文－简体
中文－繁體

Dynamic Wafer Marker (PDF)
English
中文－简体
中文－繁體

Prelude Wafer Packing (PDF)
English
中文－简体
中文－繁體

Wafer Sorter/ EFEM (PDF)
English
中文－简体
中文－繁體

OM loader for visual inspection

System Feature