Vertically Integrated Engineering Service


As a vertically integrated solution provider, Quartet Mechanics brings you value-added engineering services and wafer handling automation systems. Equipped with production-ready building blocks, we deliver time- and cost- efficient standard, semi-standard or custom systems for your application.

Sample Application

12" Thin Wafer Non-Contact Handling

12”, ~200μm thin and warped wafer, EFEM for inspection equipment, edge grip allowed only, top approach pick/place wafer on its inspeciton chuck

8" Thin Wafer Non-Contact Handling

8”, ~150μm thin warped and Taiko wafer sorter with absolute encode flipping, Bernoulli-aided edge grip on exclusion zone

12" Glass Wafer Non-Contact Handling

12” transparent glass wafer, EFEM for metrology equipment, only edge grip allowed, top approach pick/place wafer on its metrology chuck

6" or 8" SiC Wafer Non Contact Handling

6" or 8" (bridging) SiC translucent wafer, edge grip allowed only, 1.6mm thin gripper blade permits random accessing 25-slotted cassette

Flexible Layout

Quartet Mechancis is a full service engineering & system integration company which develops and installs robotic-based work cells & integrated systems for wafer handling to meet class 1 to 100 cleanliness requirements.

  • Highly configurable platform; design for all wafer sizes, materials and thickness
  • 2-FOUP, 3-FOUP, 4-FOUP reach, compact footprint
  • Multi size wafer, multi type carrier (FOUP + cassette)
  • Vacuum grip (contact type), electrical driven edge grip (non-contact type), Bernoulli-aided
  • Single arm robot, dual arm robot, flipping
  • E84 Compatible/communication

Sorter/EFEM Software

With a highly configurable and scalable software platform, it features 。

  • Software driven for multi size wafer or multi type carrier
  • Easy system operation software; animated GUI with multi language capability
  • Hardware or software handshaking with process tool
  • MES integration or SECS/GEM host communication

Building Blocks

Our versatile sorter/EFEM is enabled by our bottom-up wafer handling solution: home-grown end effector and aligner

  • > 100 configuration edge grip end effectors, top or bottom approach, for 4~6 axis robots
  • Aligner with edge grip, Bernoulli-aided, hybrid type etc
  • All built with our signature SoftTouch mechanism offering safe programmable gripping force

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Quartet Mechanics Introduction (PDF)
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Bondless Wafer Stacking (PDF)
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