As a vertically integrated solution provider, Quartet Mechanics brings you value-added engineering services and wafer handling automation systems. Equipped with production-ready building blocks, we deliver time- and cost- efficient standard, semi-standard or custom systems for your application.
12”, ~200μm thin and warped wafer, EFEM for inspection equipment, edge grip allowed only, top approach pick/place wafer on its inspeciton chuck
8”, ~150μm thin warped and Taiko wafer sorter with absolute encode flipping, Bernoulli-aided edge grip on exclusion zone
12” transparent glass wafer, EFEM for metrology equipment, only edge grip allowed, top approach pick/place wafer on its metrology chuck
6" or 8" (bridging) SiC translucent wafer, edge grip allowed only, 1.6mm thin gripper blade permits random accessing 25-slotted cassette
Quartet Mechancis is a full service engineering & system integration company which develops and installs robotic-based work cells & integrated systems for wafer handling to meet class 1 to 100 cleanliness requirements.
With a highly configurable and scalable software platform, it features 。
Our versatile sorter/EFEM is enabled by our bottom-up wafer handling solution: home-grown end effector and aligner