不同晶圆的应用

Quartet Mechancis Quartet Mechancis 是一家提供全方位服务的工程和系统集成公司，开发和安装基于机器人的工作单元和用于晶圆处理的集成系统，以满足 1 至 100 级清洁度要求。

• Highly configurable platform; design for all wafer sizes, materials and thickness
• 2-FOUP, 3-FOUP, 4-FOUP reach, compact footprint
• Multi size wafer, multi type carrier (FOUP + cassette)
• Vacuum grip (contact type), electrical driven edge grip (non-contact type), Bernoulli-aided
• Single arm robot, dual arm robot, flipping
• E84 Compatible/communication

凭借高度可配置和可扩展的软件平台，它具有以下特点:

• Software driven for multi size wafer or multi type carrier
• Easy system operation software; animated GUI with multi language capability
• Hardware or software handshaking with process tool
• MES integration or SECS/GEM host communication

我们的多功能分选机/EFEM利用我们自行开发组件(末端执行器和对准器)支持各式特殊晶圆处理解决方案

• > 100 configuration edge grip end effectors, top or bottom approach, for 4~6 axis robots
• Aligner with edge grip, Bernoulli-aided, hybrid type etc
• All built with our signature SoftTouch mechanism offering safe programmable gripping force